ZYGO ZMI-2002 8020-0211-1-J

Description

Product Description

• Multi-Axis Control: Supports two independent measurement axes on a single board, reducing system complexity and integration costs.
• High-Speed Data Processing: Achieves up to 7.7 MHz P2 data rates for real-time motion control, ensuring rapid response to dynamic positioning commands.
• Adaptive Noise Cancellation: Built-in filters minimize electromagnetic interference (EMI), enhancing reliability in high-noise industrial settings.
• Modular Design: Simplified P2 interfacing allows easy expansion to up to 16 axes in a single network, ideal for distributed control systems.

Product Parameters

Parameter	Specification
Input Voltage	+5V ±5% at 3.5A, +12V ±10% at 0.1A
Output Voltage Range	±10V (analog) for actuator control
Communication Interfaces	VMEbus (A24/D32), P2 interface (32-bit)
Positioning Resolution	<0.1nm (with compatible interferometers)
Bandwidth	20kHz (closed-loop)
Linearity	±0.05% of full scale
Time Resolution	25ns
Operating Temperature	0°C to 40°C (non-condensing)
Dimensions	233.4mm x 160mm x 25.4mm (W x H x D)
Mounting	Rack-mountable (6U VME form factor)

ZMI-2002 8020-0211-1-J

Advantages and Features

1. Ultra-Precision Control: The ZMI-2002 achieves sub-nanometer resolution, making it suitable for applications requiring atomic-level precision, such as EUV lithography and semiconductor wafer inspection.
2. Real-Time Diagnostics: Integrated sensors monitor temperature, voltage, and signal integrity, providing instant alerts for maintenance and fault correction.
3. Energy Efficiency: Low-power standby mode reduces energy consumption by 30% compared to legacy controllers, ideal for 24/7 operation.
4. Software Integration: Compatible with ZYGO’s MX software suite, enabling advanced data analysis, visualization, and automated measurement sequences.
5. Rugged Design: Built with industrial-grade components, it withstands harsh environments, including vibration and temperature fluctuations.

Application Areas and Use Cases

• Semiconductor Manufacturing: Controlling wafer stages in lithography tools to achieve nanometer-scale pattern alignment.
• Aerospace and Defense: Positioning adaptive optics in telescopes and targeting systems for high-precision imaging.
• Research Laboratories: Driving nano-positioning stages in scanning probe microscopy and interferometry experiments.

Competitor Comparison

• Higher Bandwidth: 20kHz closed-loop bandwidth vs. typical 10kHz found in competing systems, enabling faster response to dynamic motion commands.
• Wider Voltage Output: ±10V analog output supports a broader range of piezoelectric actuators.
• Integrated Diagnostics: Real-time health monitoring reduces troubleshooting time by 50% compared to controllers without built-in analytics.
  

  ZMI-2002 8020-0211-1-J

Selection Recommendations

1. System Compatibility: Ensure your control system supports VMEbus or P2 interfaces for seamless integration.
2. Precision Requirements: Verify the module’s resolution (<0.1nm) aligns with your application’s accuracy needs.
3. Environmental Conditions: Confirm the operating temperature (0°C to 40°C) and humidity levels match your setup.
4. Software Ecosystem: Leverage ZYGO’s MX software for advanced data processing and automation.

Precautions

1. Installation:
   • Mount the module in a well-ventilated area to prevent overheating.
   • Use shielded cables for signal connections to minimize EMI interference.
2. Operation:
   • Do not exceed the rated output voltage or current to avoid damage to connected actuators.
   • Calibrate the system using ZYGO’s alignment tools before initial use.
3. Maintenance:
   • Regularly update firmware via ZYGO’s Control Suite to access the latest features.
   • Inspect cooling vents quarterly and clean with compressed air to maintain thermal efficiency.